Novel development of the weighing method for automatic Czochralski crystal growth of semiconductors

It is demonstrated both experimentally and theoretically that, by modulating the heater power supplied to the melt and by cross correlating that modulated signal with the output of a crystal weight sensor, a robust signal can be obtained which increases strongly as grow-out of a semiconductor crysta...

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Bibliographic Details
Published in:Journal of crystal growth 1993-09, Vol.132 (1), p.1-19
Main Authors: Joyce, G.C., Hurle, D.T.J., Vaughan, Q.A.E.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of crystal growth
physics of crystal growth
Physics
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
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Summary:It is demonstrated both experimentally and theoretically that, by modulating the heater power supplied to the melt and by cross correlating that modulated signal with the output of a crystal weight sensor, a robust signal can be obtained which increases strongly as grow-out of a semiconductor crystal from a seed proceeds. This signal could be used as an improved sensor in automatic diameter control systems for semiconductor growth and overcomes the problem of using the differentiated weight signal directly which, in some situations, fails to detect rapid grow-out soon enough to avoid “flash-out” of the crystal.
ISSN:0022-0248
1873-5002
DOI:10.1016/0022-0248(93)90241-N