Polysilicon hollow beam lateral resonators

The first microfabrication of hollow polysilicon beams is reported. Arrays of lateral resonators are designed, processed, and tested with resonant frequencies from 8 kHz to 0.5 MHz. The quality factor as a function of pressure of the hollow beam resonators is compared with solid beam resonators, and...

Full description

Saved in:
Bibliographic Details
Main Authors: Judy, M.W., Howe, R.T.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Etching
Fabrication
Laboratories
Microstructure
Optical resonators
Process design
Resonant frequency
Solids
Testing
Citations: Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The first microfabrication of hollow polysilicon beams is reported. Arrays of lateral resonators are designed, processed, and tested with resonant frequencies from 8 kHz to 0.5 MHz. The quality factor as a function of pressure of the hollow beam resonators is compared with solid beam resonators, and values as high as 34000 are obtained in vacuum. The hollow beam resonators are verified with theory and compared to resonators with solid cross sections.< >
DOI:10.1109/MEMSYS.1993.296911