X-Ray Photoelectron Studies of TiCo Surface Treated in RF-Plasma in H sub 2 Atmosphere

Modification of structural and elemental composition of the TiCo intermetallide subsurface layer after RF-discharge plasma treatment in the H sub 2 atmosphere has been studied by X-ray photoelectron spectroscopy, X-ray diffraction and SIMS using positive and negative secondary ions. The TiH sub 2-x...

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Bibliographic Details
Published in:Journal of electron spectroscopy and related phenomena 1993-07, Vol.68, p.699-702
Main Authors: Chopovskaya, E V, Nosenko, V U, Pivovarov, A L
Format: Article
Language:English
Online Access:Get full text
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Summary:Modification of structural and elemental composition of the TiCo intermetallide subsurface layer after RF-discharge plasma treatment in the H sub 2 atmosphere has been studied by X-ray photoelectron spectroscopy, X-ray diffraction and SIMS using positive and negative secondary ions. The TiH sub 2-x (0 < x < 1) hydride phase layer has been shown to form as a result of the plasma treatment. The growth of the hydride is suggested to take place on the original surface by diffusion of Ti atoms through partially reduced oxide layer to the specimen-plasma boundary. So the original subsurface area is enriched with cobalt. The ion-plasma treatment is considered as promising technique for activation of the TiCo surface.
ISSN:0368-2048