Accuracy improvement of linear stages using on-machine geometric error measurement system and error transformation model

• Published in: Optics express 2022-02, Vol.30 (5), p.7539-7550
• Main Authors: Cai, Yindi, Wang, Luhui, Liu, Yang, Li, Chang, Fan, Kuang-Chao
• Format: Article
• Language: English
• ISSN: 1094-4087; 1094-4087
• DOI: 10.1364/OE.453111

In order to improve the accuracy of linear stages, a compact, portable and easy installation of a six-degree-of-freedom (6DOF) geometric error measurement system, in which two mirrors with special position and orientation are innovatively regarded as the sensitive elements of the roll error, is proposed. A set of combined focus lenses is integrated into the 6DOF measurement system to improve the resolution of the roll error. The accuracy of a linear stage is evaluated by the positional errors at the functional point, which is located at the working volume of a linear stage. An error transformation model based on the Abbe principle and the Bryan principle is established to estimate the positional errors at the functional point according to those at the measurement point. A series of experiments are carried out to verify the capable of the designed system and the effectiveness of the established model.