Microstructural investigation of droplets in arc-evaporated TiN films

• Published in: Surface & coatings technology 1994-01, Vol.63 (1), p.123-128
• Main Authors: Ljungcrantz, H., Hultman, L., Sundgren, J.-E., Håkansson, G., Karlsson, L.
• Format: Article
• Language: English
• Subjects: Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/S0257-8972(05)80016-7

The microstructure and composition of macro particles (droplets) in TiN films deposited by arc evaporation on cemented-carbide substrates were investigated using a combination of scanning electron microscopy, cross-sectional transmission electron microscopy (TEM) including lattice resolution TEM, X-ray diffraction (XRD), energy-dispersive X-ray analysis and electron energy loss spectroscopy. The apparent surface number density of droplets, with diameters of 0.1–10 μm, was found to be about 10 7 cm −2. Droplets were incorporated in the film at various distances from the substrate surface. In between the droplets, the TiN films exhibited a dense columnar microstructure. On top of the incorporated droplets, the TiN films grew in a pronounced columnar structure with a column diameter close to the droplet diameter. The core of the droplets consisted of equiaxed grains of an α-Ti superstructure containing approximately 3–5 at.% N whereas the rim of the droplets had increasing nitrogen content up to 50 at.% XRD showed evidence for the presence of Ti 2N possibly at the rim of the droplets. Beneath each droplet a large voided region was observed with the shape of a flattened torus as a consequence of droplets being incorporated in the solid state and subsequent shadowing of the Ti flux to the film.