New (super) self aligned MOS controlled thyristors, (S)SAMCTs, switching 20 A at 4 kV

New MOS controlled thyristor structures, called (Super) Self Aligned MOS Controlled Thyristors, (S)SAMCTs, have been fabricated and characterized. A simplified cathode structure in which all critical layers are self aligned enables the fabrication of reliable large area devices with reduced technolo...

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Bibliographic Details
Main Authors: Dettmer, H., Fichtner, W., Bauer, P.
Format: Conference Proceeding
Language:English
Subjects:
Costs
Fabrication
FETs
Graphics
Laboratories
MOSFET circuits
Silicon compounds
Snubbers
Thyristors
Voltage
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Summary:New MOS controlled thyristor structures, called (Super) Self Aligned MOS Controlled Thyristors, (S)SAMCTs, have been fabricated and characterized. A simplified cathode structure in which all critical layers are self aligned enables the fabrication of reliable large area devices with reduced technology complexity. Small experimental devices show equivalent electrical performance compared to conventional MCTs. Successfully fabricated large area (1 cm/sup -2/) SAMCTs are able to turn off 20 A at 4 kV in 5 /spl mu/s under inductive load without any snubber.< >
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.1994.383384