The deposition of diamond film with high thermal conductivity

In this paper, the main factors influencing thermal conductivity of diamond film were analyzed in theory. The thermal conductivity of diamond film was measured by means of the photothermal deflection method. Various crystal structures of diamond films were obtained by synthesis with various depositi...

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Bibliographic Details
Published in:Thin solid films 1997-12, Vol.311 (1), p.124-127
Main Authors: Gu, Changzhi, Jin, Zengsun, Lu, Xianyi, Zou, Guangtian, Zhang, Jifa, Fang, Rongchuan
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Chemical vapour deposition (CVD)
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Diamond
Exact sciences and technology
Grain boundary
Impurities
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nonelectronic thermal conduction and heat-pulse propagation in solids
thermal waves
Physics
Transport properties of condensed matter (nonelectronic)
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Summary:In this paper, the main factors influencing thermal conductivity of diamond film were analyzed in theory. The thermal conductivity of diamond film was measured by means of the photothermal deflection method. Various crystal structures of diamond films were obtained by synthesis with various deposition methods and conditions. Diamond films synthesized under lower concentration of methane and technique of annealing by MWPCVD method have higher thermal conductivity. Thermal conductivity of diamond film increases with the increasing of removal thickness for the SiC layer on the back of the film. (100)-oriented diamond thick films have higher thermal conductivity.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(97)00447-1