Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

The mechanisms causing stiction of polysilicon structures fabricated by surface micromachining techniques have been investigated. It is found that during drying from rinse liquids attractive dynamic capillary forces are responsible for bringing micromechanical structures into contact with the underl...

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 1994-05, Vol.43 (1), p.230-238
Main Authors: Legtenberg, Rob, Tilmans, Harrie A.C., Elders, Job, Elwenspoek, Miko
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:The mechanisms causing stiction of polysilicon structures fabricated by surface micromachining techniques have been investigated. It is found that during drying from rinse liquids attractive dynamic capillary forces are responsible for bringing micromechanical structures into contact with the underlying substrate. Measured adhesion energies of sticking microbridges indicate that van der Waals forces are responsible for the stiction of hydrophobic surfaces and that hydrogen bridging is an additional adhesion mechanism for hydrophilic surfaces. Methods to reduce the stiction problem are indicated.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(93)00654-M