Holographic interferometric microscope for complete displacement determination

Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation is completely separate...

Full description

Saved in:
Bibliographic Details
Published in:Optical Engineering 1997-09, Vol.36 (9), p.2448-2456
Main Authors: Kruschke, Oliver, Wernicke, Gu¨nther, Huth, Torsten, Demoli, Nazif, Gruber, Hartmut
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation is completely separated from holographic recording. The holographic microscope performs maximum flexibility of magnification combined with high imaging accuracy. The phase-shift technique and Fourier analysis with a carrier frequency are applied for interferogram evaluation. Both methods are compared regarding the measurement range, accuracy, and handling. In-plane and out-of-plane displacement components can be measured simultaneously by both evaluation methods. A cantilever beam, a circular plate, and a surface-mounted microresistor are used to demonstrate the capabilities of the holographic microscope. ©
ISSN:0091-3286
1560-2303
DOI:10.1117/1.601420