Microstructure design of HIPed TiO2 ceramics for improved corrosion resistance

The potential applications of HIPed TiO2 ceramics include structural components in production equipment of semiconductors. In this application, the material must withstand severe attack from various chemicals which are commonly used in the production of semiconductors. For designing a material with...

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Bibliographic Details
Published in:Journal of materials science letters 1997, Vol.16 (16), p.1342-1344
Main Authors: KISHI, Y, SHIMOJIMA, H, OHSIO, S, SAITOH, H, UEMATSU, K
Format: Article
Language:English
Subjects:
Applied sciences
Building materials. Ceramics. Glasses
Ceramic industries
Chemical industry and chemicals
Exact sciences and technology
Miscellaneous
Technical ceramics
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Summary:The potential applications of HIPed TiO2 ceramics include structural components in production equipment of semiconductors. In this application, the material must withstand severe attack from various chemicals which are commonly used in the production of semiconductors. For designing a material with optimum properties, it is necessary to examine the effect of microstructure on the corrosion resistance. Corrosion in aqueous solutions of various chemicals in boiling conditions for specimens HIPed at 1000 C was investigated. Only a very small weight loss was noted for all of them, showing the very high corrosion resistance of this material. The strength remained essentially the same as the initial value in all solutions. Clearly a material with excellent corrosion resistance was successfully developed by HIPing the high purity material of very fine particle size at low temperature. 6 refs.
ISSN:0261-8028
DOI:10.1023/A:1018568101522