Modern trends in microstructures and integrated optics for communication, sensing, and actuation

Recent progress in micro-opto-electro-mechanical systems (MOEMSs) has enabled the realization of a variety of novel devices, which, because of their small size and low cost, have the potential to revolutionize the fields of communication, sensing, and actuation. These micro-optical devices can be cl...

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Bibliographic Details
Published in:Optical Engineering 1997-05, Vol.36 (5), p.1307-1318
Main Authors: Tabib-Azar, Massood, Beheim, Glenn
Format: Article
Language:English
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Summary:Recent progress in micro-opto-electro-mechanical systems (MOEMSs) has enabled the realization of a variety of novel devices, which, because of their small size and low cost, have the potential to revolutionize the fields of communication, sensing, and actuation. These micro-optical devices can be classified as either free-space optical or guided-wave in nature, and here we focus on the latter. We review the research on this subject and discuss results from our own research. We also identify technology bottlenecks and discuss the recent trends in this dynamic field. ©
ISSN:0091-3286
1560-2303
DOI:10.1117/1.601331