A laser-acoustic method for testing and classifying hard surface layers

• Published in: Thin solid films 1998-11, Vol.332 (1-2), p.157-163
• Main Authors: SCHNEIDER, D, SCHULTRICH, B, SCHEIBE, H.-J, ZIEGELE, H, GRIEPENTROG, M
• Format: Article
• Language: English
• Subjects: Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Materials science; Materials testing; Measurement and testing methods; Measurement methods and techniques in continuum mechanics of solids; Mechanical and acoustical properties; Nondestructive testing: ultrasonic testing, photoacoustic testing; Physical properties of thin films, nonelectronic; Physics; Solid mechanics; Structural and continuum mechanics; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/S0040-6090(98)00988-2

The laser-acoustic method (LAM) was used to determine the Young's modulus of multilayers of diamond-like carbon (DLC) and aluminum deposited on Si and steel by laser-arc. Results reveal the reproducibility of the deposition technique and demonstrate the potential of the LAM to test multilayer films. LAM is sensitive to machining layers. The effect of grinding and polishing of the steel surfaces was also studied. LAM was compared to the micro-indentation technique by using both methods to test TiN, CrN and TiCN films, and to the membrane deflection technique with polysilicon films.