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(Bio-)chemical and physical microsensor arrays using an identical transducer principle

A new concept based on an identical transducer principle and structure for both (bio-)chemical and physical sensors is presented. For all sensors, the field effect is used as transducer principle. In this approach, the same chemical sensor is employed also as a physical sensor. A novel design of a t...

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Bibliographic Details
Published in:Electrochimica acta 2001-09, Vol.47 (1), p.243-249
Main Authors: Poghossian, A, Lüth, H, Schultze, J.W, Schöning, M.J
Format: Article
Language:English
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Summary:A new concept based on an identical transducer principle and structure for both (bio-)chemical and physical sensors is presented. For all sensors, the field effect is used as transducer principle. In this approach, the same chemical sensor is employed also as a physical sensor. A novel design of a temperature sensor on the basis of a differential arrangement of two identical ISFETs operating in different working points is demonstrated. A multifunctionality of the sensor system is achieved by means of different sensor arrangements and/or operation modes. Thus, the number of the obtained (bio-)chemical and physical quantities, like ion concentration, temperature, flow rate can be higher than the number of the sensors applied. A hybrid sensor module, for the pH, penicillin and temperature determination is realised and its performance has been investigated.
ISSN:0013-4686
1873-3859
DOI:10.1016/S0013-4686(01)00562-X