Compositional structure of dual TiNO layers deposited on SUS 304 by an IBAD technique

Surfaces of stainless steel SUS 304 were coated with dual titanium oxynitride (TiNO) layers using a nitrogen ion beam-assisted deposition technique. The N ions were accelerated at energy of 0.5-2.0 keV with an intensity of 0.1 mA/cm exp 2 on the substrate surface. First, a TiNO film was deposited on...

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Bibliographic Details
Published in:Surface & coatings technology 2001-09, Vol.158-159, p.568-572
Main Authors: Yokota, K, Nakamura, K, Kasuya, T, Tamura, S, Sugimoto, T, Akamatsu, K, Nakao, K, Miyashita, F
Format: Article
Language:English
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Summary:Surfaces of stainless steel SUS 304 were coated with dual titanium oxynitride (TiNO) layers using a nitrogen ion beam-assisted deposition technique. The N ions were accelerated at energy of 0.5-2.0 keV with an intensity of 0.1 mA/cm exp 2 on the substrate surface. First, a TiNO film was deposited on substrates at 700 deg C, and subsequently, another TiN film was deposited on the previous TiNO film surface at 400 deg C. Hydrogen carbon nitride, CrFe, and metal carbide M sub 23 C sub 6 were produced in the near-surface region of stainless steel during the TiNO deposition at 700 deg C, and three characteristic layers consisting of iron nitride, chromium nitride and nickel nitride were formed between the TiNO films deposited and the stainless steel. These characteristic layers disappeared during deposition of the TiNO layer at a temperature of 400 deg C.
ISSN:0257-8972