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New technique to produce buried channel waveguides in glass
We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by low-temperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distrib...
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Published in: | Optical Engineering 1998-04, Vol.37 (4), p.1111-1114 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by low-temperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distribution. © |
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ISSN: | 0091-3286 1560-2303 |
DOI: | 10.1117/1.601647 |