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New technique to produce buried channel waveguides in glass

We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by low-temperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distrib...

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Bibliographic Details
Published in:Optical Engineering 1998-04, Vol.37 (4), p.1111-1114
Main Authors: Pe´lissier, Serge, Pigeon, Florent, Biasse, Be´atrice, Zussy, Marc, Pandraud, Gregory, Mure-Ravaud, Alain
Format: Article
Language:English
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Summary:We present the fabrication process and the optical characterization of buried ion-exchanged channel waveguides made by low-temperature direct bonding on Pyrex wafers. Multimode or monomode buried channel waveguides were fabricated, and the method provides very good control over the intensity distribution. ©
ISSN:0091-3286
1560-2303
DOI:10.1117/1.601647