Loading…

Development of an EB/FIB Integrated Test System

We have developed an EB/FIB integrated test system, where the in-situ verification of repair by waveform measurement in the FIB system is carried out. We discuss the characteristics of the waveform measurement by the FIB system. From experiments, the time resolution, the voltage sensitivity, and the...

Full description

Saved in:
Bibliographic Details
Published in:Microelectronics and reliability 2001-09, Vol.41 (9), p.1489-1494
Main Authors: Miura, Katsuyoshi, Nakamae, Koji, Fujioka, Hiromu
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have developed an EB/FIB integrated test system, where the in-situ verification of repair by waveform measurement in the FIB system is carried out. We discuss the characteristics of the waveform measurement by the FIB system. From experiments, the time resolution, the voltage sensitivity, and the damage control criterion are derived. We apply, the system to a faulty VLSI chip in order to show its validity, copyright 2001 Elsevier Science Ltd. All rights reserved.
ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(01)00147-0