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Development of an EB/FIB Integrated Test System
We have developed an EB/FIB integrated test system, where the in-situ verification of repair by waveform measurement in the FIB system is carried out. We discuss the characteristics of the waveform measurement by the FIB system. From experiments, the time resolution, the voltage sensitivity, and the...
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Published in: | Microelectronics and reliability 2001-09, Vol.41 (9), p.1489-1494 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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Summary: | We have developed an EB/FIB integrated test system, where the in-situ verification of repair by waveform measurement in the FIB system is carried out. We discuss the characteristics of the waveform measurement by the FIB system. From experiments, the time resolution, the voltage sensitivity, and the damage control criterion are derived. We apply, the system to a faulty VLSI chip in order to show its validity, copyright 2001 Elsevier Science Ltd. All rights reserved. |
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ISSN: | 0026-2714 1872-941X |
DOI: | 10.1016/S0026-2714(01)00147-0 |