Effect of fatigue on the pyroelectric and dielectric properties of PZT films

• Published in: Journal of the European Ceramic Society 2001, Vol.21 (10), p.1589-1592
• Main Authors: Wang, B., Chan, H.L.W., Kwok, K.W., Ploss, Beatrix, Choy, C.L., Tong, K.Y.
• Format: Article
• Language: English
• Subjects: Applied sciences; Building materials. Ceramics. Glasses; Ceramic industries; Chemical industry and chemicals; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Dielectric properties; Dielectric thin films; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Electrotechnical and electronic ceramics; Exact sciences and technology; Fatigue; Niobates, titanates, tantalates, pzt ceramics, etc; Physics; Pyroelectric and electrocaloric effects; Pyroelectric coefficient; PZT; Technical ceramics
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/S0955-2219(01)00071-1

Sol-gel derived lead zirconate titanate (PbZr 0.52Ti 0.48O 3) films of thickness 1 μm were deposited on RuO 2/SiO 2/Si and Pt/Ti/SiO 2/Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permittivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.