Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique

• Published in: Sensors and actuators. A, Physical Physical, 2001-03, Vol.89 (1), p.64-70
• Main Authors: Liew, Li-Anne, Zhang, Wenge, Bright, Victor M., An, Linan, Dunn, Martin L., Raj, Rishi
• Format: Article
• Language: English
• Subjects: Applied sciences; Ceramic; Electronics; Exact sciences and technology; High-temperature; Mechanical engineering. Machine design; MEMS; Microelectronic fabrication (materials and surfaces technology); Polymer; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(00)00545-8

In this paper, a novel and cost-effective technology for the fabrication of high-temperature MEMS based on injectable polymer-derived ceramics is described. Micro-molds are fabricated out of SU-8 photoresist using standard UV-photolithographic processes. Liquid-phase polymers are then cast into the molds and converted into monolithic, fully-dense ceramics by thermal decomposition. The resultant ceramic, based on the amorphous alloys of silicon, carbon and nitrogen, possess excellent mechanical and physical properties for high-temperature applications. This capability for micro-casting is demonstrated in the fabrication of simple single-layered, high aspect ratio SiCN microstructures. A polymer-based bonding technique for creating more complex three-dimensional structures is also presented.