Preparation of NdBa sub(2)Cu sub(3)O sub(y) thin films by mist ICP evaporation

Thin films of NdBa sub(2)Cu sub(3)O sub(y) superconductor were prepared on MgO(100) substrates by mist ICP evaporation using organometallic sol in which alkoxides of each metal element were dissolved in organic solvents as a source material. This method is one of high-temperature plasma deposition t...

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Bibliographic Details
Published in:Thin solid films 1998-12, Vol.334 (1-2), p.87-91
Main Authors: Nagata, Shingo, Wakiya, Naoki, Masuda, Yoshio, Adachi, Seiji, Tanabe, Keiichi, Sakurai, Osamu, Funakubo, Hiroshi, Shinozaki, Kazuo, Mizutani, Nobuyasu
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Language:English
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Summary:Thin films of NdBa sub(2)Cu sub(3)O sub(y) superconductor were prepared on MgO(100) substrates by mist ICP evaporation using organometallic sol in which alkoxides of each metal element were dissolved in organic solvents as a source material. This method is one of high-temperature plasma deposition techniques introducing source material into ICP (inductively coupled plasma). It was important to control substrate-plasma distance and oxygen partial pressure in the chamber to obtain (00l) peaks of NdBa sub(2)Cu sub(3)O sub(y) superconductor, and this as-deposited film was also highly in-plane-oriented along the a-axis and b-axis. Furthermore, the surface morphology of this film was composed of rectangular shapes of grains. The superconducting transition temperature T sub(c) for the post-annealed film was 91-92 K.
ISSN:0040-6090