Selective etching in laser written semiconductor-doped glasses

Semiconductor-doped glasses exposed to CW laser radiation exhibit selective chemical etching. The effect can be used to produce topographic features with negative relief, high aspect ratio, and submicron size for a number of applications.

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Bibliographic Details
Published in:Optics communications 1998-11, Vol.156 (4), p.297-299
Main Authors: Smuk, Andrei Y, Lawandy, Nabil M
Format: Article
Language:English
Subjects:
Biological and medical applications
CW laser
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Laser applications
Optics
Physics
Selective etching
Semiconductor-doped glasses
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Description
Summary:Semiconductor-doped glasses exposed to CW laser radiation exhibit selective chemical etching. The effect can be used to produce topographic features with negative relief, high aspect ratio, and submicron size for a number of applications.
ISSN:0030-4018
1873-0310
DOI:10.1016/S0030-4018(98)00427-1