Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O 2/(Ar+O 2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated....

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Bibliographic Details
Published in:Journal of power sources 2001-12, Vol.102 (1), p.167-171
Main Authors: Kim, Han-Ki, Seong, Tae-Yeon, Lim, Jae-Hong, Ii Cho, Won, Soo Yoon, Young
Format: Article
Language:English
Subjects:
Applied sciences
Capacitance
Capacitors. Resistors. Filters
Co 3O 4
Electrical engineering. Electrical power engineering
Exact sciences and technology
Gas-ratio
LiPON electrolyte
Supercapacitor
Thin-film
Various equipment and components
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Summary:The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O 2/(Ar+O 2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co 3O 4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co 3O 4/LiPON/Co 3O 4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co 3O 4 films.
ISSN:0378-7753
1873-2755
DOI:10.1016/S0378-7753(01)00864-3