Electroplating and characterization of cobalt–nickel–iron and nickel–iron for magnetic microsystems applications

• Published in: Sensors and actuators. A, Physical Physical, 2001-08, Vol.92 (1), p.242-248
• Main Authors: Rasmussen, F.E., Ravnkilde, J.T., Tang, P.T., Hansen, O., Bouwstra, S.
• Format: Article
• Language: English
• Subjects: Applied sciences; CoNiFe; Electronics; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lithography, masks and pattern transfer; Magnetic properties; Mechanical engineering. Machine design; Microelectronic fabrication (materials and surfaces technology); NiFe; Physics; PR electroplating; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(01)00556-8

The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiFe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density ( B s) and a low coercivity ( H c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).