Low temperature hydrogen detection at high concentrations: comparison of platinum and iridium

A comparison of platinum and iridium in work-function measurements with regard to hydrogen sensitivity is presented. The measurements were performed by means of a Kelvin probe and an ISFET-based measurement setup. They are concentrated towards high concentrations of hydrogen and low temperature in o...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2001-12, Vol.80 (3), p.163-168
Main Authors: Scharnagl, K., Karthigeyan, A., Burgmair, M., Zimmer, M., Doll, T., Eisele, I.
Format: Article
Language:English
Subjects:
HSGFET
Hydrogen
Iridium
Low temperature sensor
Platinum
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Summary:A comparison of platinum and iridium in work-function measurements with regard to hydrogen sensitivity is presented. The measurements were performed by means of a Kelvin probe and an ISFET-based measurement setup. They are concentrated towards high concentrations of hydrogen and low temperature in order to develop room temperature operated FET-based sensors which can withstand H 2-concentrations of some percent. With both materials the detection of H 2 up to 2% is possible. However, iridium shows very-slow reactions with adsorption as well as with desorption times of some hours. In contrast, the response times of platinum could be determined to be below 10 s in the case of 0.1% H 2. Therefore, platinum is the most promising candidate with air-gap configurations of FET like hybrid suspended gate FET (HSGFET).
ISSN:0925-4005
1873-3077
DOI:10.1016/S0924-4247(01)00672-0