Multi-degree-of-freedom displacement measurement system for milli-structures

A new multi-degree-of-freedom measurement system for milli-structures is presented. This methodology is based on optical beam deflection method and triangulation. It employs a diffraction grating as a reflective object, which reflects an incident laser beam into several directions. To obtain the pos...

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Bibliographic Details
Published in:Measurement science & technology 2001-09, Vol.12 (9), p.1495-1502
Main Authors: Bae, Eui Won, Kim, Jong-Ahn, Kim, Soo Hyun
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometers
Optical instruments, equipment and techniques
Physics
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Summary:A new multi-degree-of-freedom measurement system for milli-structures is presented. This methodology is based on optical beam deflection method and triangulation. It employs a diffraction grating as a reflective object, which reflects an incident laser beam into several directions. To obtain the pose information of a measured object, the detecting positions of zeroth- and first-order diffracted rays are measured using three 2D detectors. From these values, we can calculate six-degree-of-freedom displacement through a kinematic analysis. The performance was evaluated with resolution, measurement errors, and crosstalk. The results show that measurement errors and maximum crosstalk are within +/- 0.5 micron in translation and +/- 2 inches in rotation. As an application, we measured the multi-DOF motion of a bimorph type PZT actuator and obtained its frequency response function. (Author)
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/12/9/316