Integrated MEMS Technologies

While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing...

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Bibliographic Details
Published in:MRS bulletin 2001-04, Vol.26 (4), p.291-295
Main Authors: Franke, Andrea E., King, Tsu-Jae, Howe, Roger T.
Format: Article
Language:English
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Technical Feature
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Summary:While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing electronics are still beyond the current state of the art. There are several incentives to co-fabricate MEMS devices and electronics on a single silicon chip, which apply to applications such as inertial sensors.
ISSN:0883-7694
1938-1425
DOI:10.1557/mrs2001.62