Anisotropy control of magnetostrictive film patterns

The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when stra...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2001-07, Vol.37 (4), p.2025-2027
Main Authors: Imamura, K., Kwang-Ho Shin, Ishiyama, K., Inoue, M., Arai, K.I.
Format: Article
Language:English
Subjects:
Anisotropic magnetoresistance
Anisotropy
Annealing
Applied sciences
Capacitive sensors
Electronics
Exact sciences and technology
Magnetic anisotropy
Magnetic field induced strain
Magnetic films
Magnetic properties
Magnetic sensors
Magnetism
Magnetoelectric, magnetostrictive, magnetoacoustic, magnetooptic and magnetothermal devices. Spintronics
Magnetostriction
Magnetostrictive, magnetoacoustic, and magnetostatic devices
Perpendicular magnetic anisotropy
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors
Strain
Stress control
Stresses
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Summary:The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F/spl ap/8300, while a sensor without anisotropy exhibited F of only 500.
ISSN:0018-9464
1941-0069
DOI:10.1109/20.951042