Accuracy control of three-dimensional Nd:YAG laser shaping by ablation

Improving the dimensional accuracy along the optical axis without decreasing the materials removing rate is a key issue in three-dimensional laser shaping. This paper presents a concept for performing three-dimensional laser shaping by directly using machining laser as the photo source of the non-co...

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Bibliographic Details
Published in:Optics and laser technology 1999-09, Vol.31 (6), p.419-423
Main Authors: Liu, J.S, Li, L.J, Jin, X.Z
Format: Article
Language:English
Subjects:
Accuracy
Biological and medical applications
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Industrial applications
Laser machining
Laser shaping
Optics
Physics
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Summary:Improving the dimensional accuracy along the optical axis without decreasing the materials removing rate is a key issue in three-dimensional laser shaping. This paper presents a concept for performing three-dimensional laser shaping by directly using machining laser as the photo source of the non-contacting measuring device. Due to the high power measuring photo source and a 1.06 μm bandpass filter, the interference caused by the emission light of ablated surface can be effectively avoided, the delay time is not needed to be inserted between the laser pulse and the measurement. So the measurement will not decrease the material removal rate and productivity. By using this system, the shaping accuracy of 30 μm can be achieved at the removing rate of about 4.0×10 −2 mm 3/sec for Si 3N 4 ceramic, both are much better than the results obtained before.
ISSN:0030-3992
1879-2545
DOI:10.1016/S0030-3992(99)00089-4