Preparation and Properties of a-C:H and a-C:N:H Layers

• Published in: Key engineering materials 2002-01, Vol.206-213 (1), p.571-574
• Main Authors: Walasek, Edward, Jonas, Stanisława, Stapinski, T., Lagosz, I., Hilbig, A., Krupa, G.
• Format: Article
• Language: English
• ISSN: 1013-9826; 1662-9795; 1662-9795
• DOI: 10.4028/www.scientific.net/KEM.206-213.571

Diamond like carbon (a-C:H) and amorphous hydrogenated carbon-nitrogen (a-CN:H) layers represent a new class of materials. The layers have interesting properties, such as high hardness, high elasticity, low friction coefficient, high infrared and visible transparency, excellent corrosion resistance at elevated temperatures and tunable optical constants depending on the chemical composition of the materials. These layers can be applied in large area electronics, in manufacturing cutting tools and for nuclear reactors. Diamondlike carbon and amorphous hydrogenated carbon-nitrogen layers are not stable in normal conditions and can be obtained in the form of the layers by means of Plasma Assisted Chemical Vapor Deposition. The film properties and structure depend on the choice of the deposition method and parameters of the manufacturing process. The technology enables the production of layers of various structure and various optical, electrical and mechanical properties. (Author)