Deposition of PZT thin film and determination of their optical properties

The RF magnetron sputtering technique was applied for the thin film deposition. Hot-pressed PZT ceramics doped mainly with Bi and Ge were used as a target. The PZT thin films were grown on different substrates (Si, stainless steel and glass) and the sputtering parameters were optimised to assure the...

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Bibliographic Details
Published in:Journal of the European Ceramic Society 1999-01, Vol.19 (6), p.1489-1492
Main Authors: Czekaj, D, Gomes, M.J.M, Vasilevskiy, M, Pereira, M, Dos Santos, M.P
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Dielectric thin films
Dielectric, piezoelectric, ferroelectric and antiferroelectric materials
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Niobates, titanates, tantalates, pzt ceramics, etc
Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
optical properties
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
PZT
RF magnetron sputtering
X-ray methods
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Summary:The RF magnetron sputtering technique was applied for the thin film deposition. Hot-pressed PZT ceramics doped mainly with Bi and Ge were used as a target. The PZT thin films were grown on different substrates (Si, stainless steel and glass) and the sputtering parameters were optimised to assure the composition transfer between the target and the thin film. The obtained samples were analysed first as made and then after post deposition annealing. Structure of the films was investigated by X-ray diffraction. Optical properties of the thin films were investigated by: (i) linear absorption method and (ii) Raman scattering. Results of the modelling of the optical spectra for the PZT films on glass substrates are also reported.
ISSN:0955-2219
1873-619X
DOI:10.1016/S0955-2219(98)00461-0