Diffraction gratings in sol–gel films by direct contact printing using a UV-mercury lamp

We report on the fabrication of diffraction gratings in photosensitive sol–gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol–gel films by contact printing with an incoherent UV-light source....

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Bibliographic Details
Published in:Optics communications 1999-04, Vol.162 (4), p.215-218
Main Authors: Äyräs, P, Rantala, J.T, Honkanen, S, Mendes, S.B, Peyghambarian, N
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Diffraction grating
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Fabrication techniques
lithography, pattern transfer
Fundamental areas of phenomenology (including applications)
Gratings
Integrated optics
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
Optical elements, devices, and systems
Optics
Photolithography
Physics
Sol–gel
UV-lithography
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Summary:We report on the fabrication of diffraction gratings in photosensitive sol–gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol–gel films by contact printing with an incoherent UV-light source. Gratings with 1-μm period were fabricated in sol–gel films. The diffraction efficiencies of each diffracted order were measured and compared to theoretical values. The demonstrated process of contact printing using a regular UV-light source in the optically compatible sol–gel material has potential for large-scale fabrication of submicrometer gratings at very low cost.
ISSN:0030-4018
1873-0310
DOI:10.1016/S0030-4018(99)00108-X