EFFECT OF FILM COMPOSITION ON THE ORIENTATION OF (Ba,Sr)TiO3 GRAINS IN (Ba,Sr)yTiO2+y THIN FILMS

Thin films of composition (Ba,Sr)yTiO2+y, with y = 0.43- 1.64, were deposited by metallorganic CVD on (100) MgO substrates at various growth conditions. XRD and TEM studies showed that the films were composed of epitaxial Ba1-xSrxTiO3 (x approximately 0.06) grains and an amorphous phase. The orienta...

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Bibliographic Details
Published in:Journal of materials research 1999-01, Vol.14 (12), p.4657-4666
Main Authors: Kaiser, D L, Vaudin, M D, Rotter, L D, Bonevich, J E, Levin, I, Armstrong, J T, Roytburd, A L, Schlom, D G
Format: Article
Language:English
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Summary:Thin films of composition (Ba,Sr)yTiO2+y, with y = 0.43- 1.64, were deposited by metallorganic CVD on (100) MgO substrates at various growth conditions. XRD and TEM studies showed that the films were composed of epitaxial Ba1-xSrxTiO3 (x approximately 0.06) grains and an amorphous phase. The orientation of the tetragonal Ba1-xSrxTiO3 grains (pure a axis, pure c axis, or a mix of the two) was found to be strongly dependent upon film composition. This composition dependence is explained for the majority of the Ti-rich films by an analysis of average strains in the two-phase films, assuming a compressive strain of approximately equal to 1% in the amorphous phase. 40 refs.
ISSN:0884-2914