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Magnetorheological suspension-based high precision finishing technology (MRF)
In MRF the mechanical energy for material removal is generated by the hydrodynamic flow of a magnetorheological (MR) polishing suspension throughout a preset converging gap formed by the workpiece surface and a moving rigid wall. MRF reduces the surface microroughness of optical materials to less th...
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Published in: | Journal of intelligent material systems and structures 1999-01, Vol.9 (8), p.650-654 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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Summary: | In MRF the mechanical energy for material removal is generated by the hydrodynamic flow of a magnetorheological (MR) polishing suspension throughout a preset converging gap formed by the workpiece surface and a moving rigid wall. MRF reduces the surface microroughness of optical materials to less than or equal to 10 angstrom. Shape errors are corrected to a fraction of a wavelength of light and subsurface damage is removed. |
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ISSN: | 1045-389X |