Visualization of Knoop Indentation Damage of Silicon Nitride by Plasma Etching

A visualizing technique for indentation damage of ceramics was developed. Plasma etching was used to enhance the view of cracks and the subsurface microcracking crush zone following Knoop indentation of hot pressed Si3N4. The microcracking zone was readily identified from the surface view of the ind...

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Bibliographic Details
Published in:Journal of the American Ceramic Society 2001-10, Vol.84 (10), p.2427-2429
Main Authors: Kanematsu, Wataru, Miyajima, Tatsuya, Sando, Mutsuo
Format: Article
Language:English
Subjects:
Applied sciences
Building materials. Ceramics. Glasses
Ceramic industries
Chemical industry and chemicals
damage
Exact sciences and technology
indentation
silicon nitride
Structural ceramics
Technical ceramics
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Summary:A visualizing technique for indentation damage of ceramics was developed. Plasma etching was used to enhance the view of cracks and the subsurface microcracking crush zone following Knoop indentation of hot pressed Si3N4. The microcracking zone was readily identified from the surface view of the indented surface as a grain‐falling‐off region (GFOR), defined as a region in which grains were removed by preferential etching using CF4 gas, followed by ultrasonic cleaning. A fissure‐like opening corresponding to the indentation cracks was also observed. It is inferred that the formation of the GFOR region and the fissure‐like opening were caused by the etching/cleaning treatment. Meanwhile, the etching on a section which included diagonals of the impression provided a section view of the microcracking zone.
ISSN:0002-7820
1551-2916
DOI:10.1111/j.1151-2916.2001.tb01026.x