Nanoindentation of a 10 nm thick thin film

In a nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we have analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis and then established a method to estima...

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Bibliographic Details
Published in:Journal of materials research 1999-06, Vol.14 (6), p.2228-2232
Main Authors: Sawa, Takeshi, Akiyama, Yasushi, Shimamoto, Atsushi, Tanaka, Kohichi
Format: Article
Language:English
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Summary:In a nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we have analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis and then established a method to estimate the intrinsic elastic modulus of the film from the nanoindentation data. The method was applied to analyze the nanoindentation data of a less-than-10 nm penetration depth on a 10 nm thick diamondlike carbon film deposited on a 50 nm thick magnetic layer.
ISSN:0884-2914
2044-5326
DOI:10.1557/JMR.1999.0299