Plasma-induced free radicals of polycrystalline carbohydrates as spin probe for plasma diagnosis of plasma treatment

In view of the fact that surface reactions of plasma treatment are initiated by plasma-induced surface radicals, study of such radicals is of utmost importance for understanding of the nature of plasma treatment. Since each parameter to specify the plasma eventually affects the intensity of plasma,...

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Bibliographic Details
Published in:Thin solid films 1999-05, Vol.345 (1), p.85-89
Main Authors: Kuzuya, Masayuki, Ito, Kousuke, Kondo, Shin-ichi, Yamauchi, Yukinori
Format: Article
Language:English
Subjects:
Carbohydrates
Electric and magnetic measurements
Electron spin resonance
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma diagnosis
Plasma diagnostic techniques and instrumentation
Plasma treatment
Plasma-induced free radicals
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Summary:In view of the fact that surface reactions of plasma treatment are initiated by plasma-induced surface radicals, study of such radicals is of utmost importance for understanding of the nature of plasma treatment. Since each parameter to specify the plasma eventually affects the intensity of plasma, ‘‘plasma power’’, to generate the surface radicals, we have examined to develop the method to deduce the plasma power useful for experimental and practical designs of plasma treatment. In the light of the special features of plasma-induced polycrystalline myo-inositol radicals, we report here that measurement of such a radical formation can be used as chemical diagnostic tool for plasma power.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(99)00114-5