Pyroelectric and sensor properties of ferroelectric thin films for energy conversion

• Published in: Journal of the European Ceramic Society 1999-01, Vol.19 (6), p.1467-1471
• Main Authors: Buchanan, Relva C, Huang, Jie
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Exact sciences and technology; ferroelectric properties; Ferroelectricity and antiferroelectricity; Niobates, titanates, tantalates, pzt ceramics, etc; Physics; pyroelectric properties; PZT; sensors
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/S0955-2219(98)00454-3

High pyroelectric coefficients and improved conversion effects were successfully demonstrated in highly (111)-oriented ferroelectric PZT 90/10 films on Pt/Si substrates. The strong preferred orientation exhibited by these films was obtained through controlled heat-treatment using a specially developed MOD process on Pt/Ti/SiO 2/Si substrates. Within the FE LT–FE HT phase transition range of 80∼100°C, the films exhibited significant changes in spontaneous polarization, by roughly a factor of 2 (∼ 7 μC cm −2). A pyroelectric current, correlated to a pyroelectric coefficient of 30±10 nC cm 2 K, was obtained around room temperature without poling treatment. A prototype pyroelectric transformer based on these films gave a voltage output of 0·8 volt from a 1 mm 2 area on a 1·0 μm thick film. Compared to bulk ceramics and thick films, these thin films also exhibited at least one order of magnitude higher working frequency.