Self-shadowing and surface diffusion effects in obliquely deposited thin films

The production of highly porous films by oblique deposition has attracted recent attention because of the possible applications of such films. The morphology of obliquely evaporated films is thought to be determined mainly by the mechanisms of self-shadowing and surface diffusion. The thin film proc...

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Bibliographic Details
Published in:Thin solid films 1999-02, Vol.339 (1-2), p.88-94
Main Authors: VICK, D, FRIEDRICH, L. J, DEW, S. K, BRETT, M. J, ROBBIE, K, SETO, M, SMY, T
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Theory and models of film growth
Vapor phase epitaxy
growth from vapor phase
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Summary:The production of highly porous films by oblique deposition has attracted recent attention because of the possible applications of such films. The morphology of obliquely evaporated films is thought to be determined mainly by the mechanisms of self-shadowing and surface diffusion. The thin film process simulator GROFILMS has been used to verify the importance of these effects, and clarify some aspects of how they interact to determine the final film morphology. Good agreement between simulations and actual films has been achieved. Temperature control of the film during deposition is shown to be an important consideration for the production of structurally engineered films.
ISSN:0040-6090
1879-2731
DOI:10.1016/s0040-6090(98)01154-7