EFFECT OF LaNiO3 TOP ELECTRODE ON THE RESISTANCE OF Pb(Zr,Ti)O3 FERROELECTRIC CAPACITOR TO HYDROGEN DAMAGE AND FATIGUE

The polarization hysteresis characteristics of Pb(Zr,Ti)O3 (PZT) capacitors with a Pt top electrode are degraded by annealing in a H-containing environment due to the catalytic effect of Pt. This degradation can be avoided by adopting an LaNiO3 (LNO) conductive film as a top electrode. The LNO film...

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Published in:Jpn.J.Appl.Phys ,Part 1. Vol. 41, no. 3A, pp. 1470-1476. 2002 Part 1. Vol. 41, no. 3A, pp. 1470-1476. 2002, 2002, Vol.41 (3A), p.1470-1476
Main Authors: Kim, D-C, Lee, W-J
Format: Article
Language:English
Online Access:Get full text
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Summary:The polarization hysteresis characteristics of Pb(Zr,Ti)O3 (PZT) capacitors with a Pt top electrode are degraded by annealing in a H-containing environment due to the catalytic effect of Pt. This degradation can be avoided by adopting an LaNiO3 (LNO) conductive film as a top electrode. The LNO film does not act as a catalyst for the dissociation of H molecules and it is also a good diffusion barrier to the H molecules. The resistance of the LNO film to H degradation is further enhanced by inserting a thin Pt layer between the LNO and PZT films due to the blocking ability of Pt against the out-diffusion of the Pb component from the PZT film. The polarization characteristics of LNO/Pt/PZT/Pt capacitors are well preserved after H annealing even at 400 C for 30 min. The use of the LNO film as a top electrode also improves the fatigue property of PZT capacitors. 18 refs.
ISSN:0021-4922
DOI:10.1143/JJAP.41.1470