Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

Hafnium oxide (HfO 2) films were deposited on silica and glass substrates by ion (Xe +) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out...

Full description

Saved in:
Bibliographic Details
Published in:Thin solid films 1999-10, Vol.354 (1), p.19-23
Main Authors: Alvisi, M., Scaglione, S., Martelli, S., Rizzo, A., Vasanelli, L.
Format: Article
Language:English
Subjects:
Ion bombardment
Keywords: Optical coatings
Oxides
X-ray diffraction
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Hafnium oxide (HfO 2) films were deposited on silica and glass substrates by ion (Xe +) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out by means of X-ray diffraction and spectrophotometric analysis. Compaction of the films by ion beam assistance is clearly evidenced by the changes in their microstructure. A three steps transition from a random monoclinic phase, via amorphous phase, up to an highly phase oriented (fiber texture), as a function of ion momentum, has been found.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(99)00534-9