The effect of annealing temperature on the structure of diamond-like carbon films by electrodeposition technique

• Published in: Journal of materials science 1999-11, Vol.34 (21), p.5205-5209
• Main Authors: JIU, J.-T, HAO WANG, CAO, C.-B, ZHU, H.-S
• Format: Article
• Language: English
• Subjects: Annealing; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Crystallites; Diamond-like carbon films; Electrodeposition; Electrodeposition, electroplating; Exact sciences and technology; Graphitization; Liquid phases; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0022-2461; 1573-4803
• DOI: 10.1023/A:1004711913325

Diamond-like films have been prepared by electrodeposition in liquid phase. The films consist of a little amount of hydrogen, which can be removed by annealing at below 600 °C. The Raman signal of annealing films suggested: (1) the intensity ratio ID/IG increases which suggested that the crystallites grew in number and size with increasing temperature; (2) the D-line position changes from 1380 to 1346 cm−1, and the G-line position from 1580 to 1604 cm−1 which indicated that partially tetrahedral bonds have been broken and have transformed to trigonal bonds, (3) the linewidths of the D and G-line decrease with the increasing annealing temperature. These results indicated that the primary bonding in the films changed gradually from sp3-bonded to sp2-bonded carbon with increasing annealing temperature, i.e., graphitization.