Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium oxide particles

Thin films were made by spinning a dispersion of tin-doped indium oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity rho of 0.3 Ohm m and some optical absorption. Annealing in vacuum at 200-400 C for 2 h, and subsequently in a...

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Bibliographic Details
Published in:Smart materials and structures 2002-10, Vol.11 (5), p.675-678
Main Authors: Ederth, Jesper, Hultåker, Annette, Heszler, Peter, Niklasson, Gunnar A, Granqvist, Claes G, Doorn, Arie van, Haag, Chris van, Jongerius, Michel J, Burgard, Detlef
Format: Article
Language:English
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Summary:Thin films were made by spinning a dispersion of tin-doped indium oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity rho of 0.3 Ohm m and some optical absorption. Annealing in vacuum at 200-400 C for 2 h, and subsequently in air at 500 C for 2 h, produced films with rho about 10 exp -3 Ohm m and a visible transmittance exceeding 90 percent. Leaving out the vacuum treatment yielded higher resistivity. (Author)
ISSN:0964-1726
1361-665X
DOI:10.1088/0964-1726/11/5/308