A low-loss Ka-band distributed MEMS 2-bit phase shifter using metal-air-metal capacitors

A two-bit wideband distributed CPW phase shifter has been developed on a 500 /spl mu/m quartz substrate for Ka-band operation. The design utilizes MEMS switches in a DMTL (Distributed MEMS Transmission Line) periodically loaded by MEMS switches and high Q (>250 at 30 GHz) metal-air-metal capacito...

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Bibliographic Details
Main Authors: Hayden, J.S., Rebeiz, G.M.
Format: Conference Proceeding
Language:English
Subjects:
Capacitors
Coplanar waveguides
Micromechanical devices
Microswitches
Phase shifters
Reflection
Springs
Transmission lines
Voltage
Wideband
Online Access:Request full text
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Description
Summary:A two-bit wideband distributed CPW phase shifter has been developed on a 500 /spl mu/m quartz substrate for Ka-band operation. The design utilizes MEMS switches in a DMTL (Distributed MEMS Transmission Line) periodically loaded by MEMS switches and high Q (>250 at 30 GHz) metal-air-metal capacitors. The MEMS switches are actuated by a low 20 volt P-P AC bias voltage via a high-resistance bias line. Estimated spring constant and switching time of the MEMS switch is 30 N/m and /spl sim/9 /spl mu/s, respectively. The two-bit design results in a reflection coefficient better than -11.5 dB, an average insertion loss of -1.5 dB, and phase shifts of 89/spl deg/, 180/spl deg/, and 270/spl deg/ at 37.7 GHz. This is currently the lowest less distributed phase shifter at Ka-band frequencies.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2002.1011625