Quasi-monolithic heterodyne laser interferometer for inertial sensing

We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mo...

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Published in:Optics letters 2022-10, Vol.47 (19), p.5120-5123
Main Authors: Zhang, Yanqi, Guzman, Felipe
Format: Article
Language:English
Subjects:
Background noise
Environmental testing
Inertial sensing devices
Interferometers
Prisms
Rejection
Sensitivity
Wave plates
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description We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of 11 p m / H z at 100 m H z and as low as 0.6 p m / H z above 1 p m . The prototype unit is 20 m m × 20 m m × 10 m m in size and weighs 4.5 g , allowing subsequent integration in compact systems.
doi_str_mv 10.1364/OL.473476
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source OSA_美国光学学会数据库1
subjects Background noise
Environmental testing
Inertial sensing devices
Interferometers
Prisms
Rejection
Sensitivity
Wave plates
title Quasi-monolithic heterodyne laser interferometer for inertial sensing
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