Large Area InP Submicron Two-Dimensional (2D) Periodic Structures Fabricated by Two-Time Laser Holography

Authors fabricated submicrometer 2-D periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300-500 nm were fabricated over large areas of the substrates. Authors measured the reflect...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 2B), p.1085-1089
Main Authors: Ohira, Tomoaki, Segawa, Tetsuro, Nagai, Kenji, Utaka, Katsuyuki, Nakao, Masashi
Format: Article
Language:English
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Summary:Authors fabricated submicrometer 2-D periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300-500 nm were fabricated over large areas of the substrates. Authors measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicrometer 2-D periodic structures. 14 refs.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.1085