Large Area InP Submicron Two-Dimensional (2D) Periodic Structures Fabricated by Two-Time Laser Holography

Authors fabricated submicrometer 2-D periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300-500 nm were fabricated over large areas of the substrates. Authors measured the reflect...

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Published in:Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 2B), p.1085-1089
Main Authors: Ohira, Tomoaki, Segawa, Tetsuro, Nagai, Kenji, Utaka, Katsuyuki, Nakao, Masashi
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container_end_page 1089
container_issue Part 1, No. 2B
container_start_page 1085
container_title Japanese Journal of Applied Physics
container_volume 41
creator Ohira, Tomoaki
Segawa, Tetsuro
Nagai, Kenji
Utaka, Katsuyuki
Nakao, Masashi
description Authors fabricated submicrometer 2-D periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300-500 nm were fabricated over large areas of the substrates. Authors measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicrometer 2-D periodic structures. 14 refs.
doi_str_mv 10.1143/JJAP.41.1085
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title Large Area InP Submicron Two-Dimensional (2D) Periodic Structures Fabricated by Two-Time Laser Holography
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