Bis(perfluorophenyl azides) as highly efficient crosslinking agents for poly(vinyl phenol)

Negative photoresists based on poly(vinyl phenol) (PVP) have been developed using bis(perfluorophenyl azides). Examples of bisPFPAs include 1,5-bis(4′-azido-2′,3′,5′,6′-tetrafluorophenyl)-1,4-pentadiene-3-one ( 4) and 2,6-bis(4′-azido-2′,3′,5′,6′-tetrafluorophenylmethylene)-4-methylcyclohexanone ( 5...

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Bibliographic Details
Published in:Reactive & functional polymers 2000-02, Vol.43 (1), p.221-225
Main Authors: Yan, Mingdi, Wybourne, M.N, Keana, John F.W
Format: Article
Language:English
Subjects:
Applied sciences
Bis(perfluorophenyl azides)
Chemical reactions and properties
Crosslinking, vulcanization
Exact sciences and technology
Negative resist
Organic polymers
Physicochemistry of polymers
Poly(vinyl phenol)
UV lithography
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Summary:Negative photoresists based on poly(vinyl phenol) (PVP) have been developed using bis(perfluorophenyl azides). Examples of bisPFPAs include 1,5-bis(4′-azido-2′,3′,5′,6′-tetrafluorophenyl)-1,4-pentadiene-3-one ( 4) and 2,6-bis(4′-azido-2′,3′,5′,6′-tetrafluorophenylmethylene)-4-methylcyclohexanone ( 5). The use of long wavelength bisPFPAs makes it possible to carry out crosslinking reactions at near UV region (around 350 nm). These bisPFPAs exhibit high crosslinking efficiencies towards PVP. Addition of only 1.8 wt% of the crosslinker to PVP gave more than 70% of film retention after development. PVP resists containing 3.6 wt% of bisPFPA yield films with 95% retention.
ISSN:1381-5148
DOI:10.1016/S1381-5148(99)00051-6