The application of porous silicon interference filters in optical sensors

Optical filters for the infrared to the UV spectral range made of porous silicon are produced and tuned by modulating the current density during the etching process. Using such filters in an optical sensor it is possible to do quantitative absorption spectroscopy without a spectrometer, as will be s...

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Bibliographic Details
Published in:Thin solid films 1997-04, Vol.297 (1), p.250-253
Main Authors: Hilbrich, S, Arens-Fischer, R, Küpper, L, Theiß, W, Berger, M.G, Krüger, M, Thönissen, M
Format: Article
Language:English
Subjects:
interference filters
optical sensors
porous silicon
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Summary:Optical filters for the infrared to the UV spectral range made of porous silicon are produced and tuned by modulating the current density during the etching process. Using such filters in an optical sensor it is possible to do quantitative absorption spectroscopy without a spectrometer, as will be shown. © 1997 Elsevier Science S.A.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(96)09364-9