Wide-field tomography imaging of a double circuit using NV center ensembles in a diamond

• Published in: Optics express 2022-10, Vol.30 (22), p.39877-39890
• Main Authors: Li, Zhonghao, Liang, Yanling, Shen, Chong, Shi, Zhenrong, Wen, Huanfei, Guo, Hao, Ma, Zongmin, Tang, Jun, Liu, Jun
• Format: Article
• Language: English
• ISSN: 1094-4087; 1094-4087
• DOI: 10.1364/OE.469077

The wide-field (2.42 mm × 1.36 mm, resolution: 5.04 µm) tomography imaging of double circuits is performed using nitrogen-vacancy (NV) center ensembles in a diamond. The magnetic-field distribution on the surface of the circuit produced by the lower layer is obtained. Vector magnetic superposition is used to separate the magnetic-field distribution produced by the lower layer from the magnetic-field distribution produced by two layers. An inversion model is used to perform the tomography imaging of the magnetic-field distribution on the lower layer surface. Compared with the measurements of the upper layer, the difference in the maximum magnetic-field intensity of inversion is approximately 0.4%, and the difference in the magnetic-field distribution of inversion is approximately 8%, where the depth of the lower layer is 0.32 mm. Simulations are conducted to prove the reliability of the imaging. These results provide a simple and highly accurate reference for the detection and fault diagnosis of multilayer and integrated circuits.