Excitation of surface plasmons on titanium nitride films: determination of the dielectric function

For the first time it is possible to observe the excitation of surface plasmons (SP) on thin titanium nitride (TiN) films. From angle- and wavelength-dependent reflection measurements the dielectric function of TiN, and thus the optical constants, were calculated. Therefore, the main aim of this wor...

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Bibliographic Details
Published in:Thin solid films 1994, Vol.237 (1), p.277-281
Main Authors: Steinmüller-Nethl, D., Kovacs, R., Gornik, E., Rödhammer, P.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Physics
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Summary:For the first time it is possible to observe the excitation of surface plasmons (SP) on thin titanium nitride (TiN) films. From angle- and wavelength-dependent reflection measurements the dielectric function of TiN, and thus the optical constants, were calculated. Therefore, the main aim of this work was the determination of the real and imaginary parts of the dielectric function ε(ω) and thus the dispersion relation of SP of TiN. This method is an alternative to the standard technique of ellipsometry for determination of the complex dielectric function.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(94)90273-9