Porous silicon layer permeated with Sn–V mixed oxides for hydrocarbon sensor fabrication

To realise advanced microsensors for a reliable monitoring of very low concentrations of pollutant species such as NO x , SO 2, CO, O 3 and aromatic hydrocarbons, the use of porous silicon (PS) layers permeated with sensing compounds has been explored. For a conformal coating of the inner structure...

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Bibliographic Details
Published in:Thin solid films 1997-04, Vol.297 (1), p.43-47
Main Authors: Angelucci, R, Poggi, A, Dori, L, Cardinali, G.C, Parisini, A, Pizzochero, G, Trifiro', F, Cavani, F, Critelli, C, Boarino, L
Format: Article
Language:English
Subjects:
Hydrocarbon sensor fabrication
Porous silicon
Semiconducting oxides
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Summary:To realise advanced microsensors for a reliable monitoring of very low concentrations of pollutant species such as NO x , SO 2, CO, O 3 and aromatic hydrocarbons, the use of porous silicon (PS) layers permeated with sensing compounds has been explored. For a conformal coating of the inner structure of the PS layer, a wet chemical permeation technique rather than a physical deposition technique has been explored. Mixed semiconducting oxides (Sn–V–O) characterized by peculiar catalytic properties towards hydrocarbons have been used as sensing compound. Results on the morphological, structural, chemical, and electrical characterization of permeated PS layer are presented and discussed.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(96)09474-6